SEMI Standards Support Services

MK Universal has extensive experience in implementing 200mm and 300mm standards. We offer the following SEMI standards support services:


Standard

Name

SEMI E4 SECS-I: SEMI Equipment Communications Standard 1 Message Transfer.
SEMI E5 SECS-II SEMI Equipment Communications Standard 2 Message Content.
SEMI E30 GEM: Generic Model for Communication and Control of SEMI Equipment.
SEMI E37 HSMS-SS: High Speed Message Service-Single Session.
SEMI E39 Object Services Standard: Concepts, Behavior, and Services.
SEMI E40 Standard for Processing Management.
SEMI E58 ARAMS (Automated, Reliability, Availability, and Maintainability Standard).
SEMI E84 Specification for Enhanced Carrier Handoff Parallel I/O Interface.
SEMI E87 Specification for Carrier Management.
SEMI E90 Specification for Substrate Tracking.
SEMI E95 Specification for Human Interface for Semiconductor Manufacturing Equipment.
SEMI E94 Specification for Control Job Management.
SEMI E99 Carrier ID Reader/Writer Functional Standard.
SEMI E116 Equipment Performance Tracking.
SEMI E127 Specification for Integrated measurement module communication.
Interface A SEMI Standards E120, E125, E132, and E134.