MK Universal has extensive experience in implementing semiconductor inspection, metrology, and automation solutions for several equipment manufacturers. We provide full service (life cycle) software application development and integration in the following areas:
Automated & Integrated Wafer Inspection
We have experience in implementing Automated and Integrated Wafer Inspection systems - IMM: Integrated Measurement modules - measurement modules intended to be integrated into manufacturing equipment, and with the capability of receiving substrates from the equipment, measuring those substrates, and returning the substrates and the measurement results to the equipment and other concerned clients. Some of the services offered in this area are:
Some of the services offered are:
- Macro Wafer Inspection
- Micro Wafer Inspection
- Site-by-Site Inspection
- Automated Review
- KLARF file reading/writing
- Recipe Development
- Wafer-less Recipe Creation
- Automated Defect Classification
- Reticle Inspection
- Edge Inspection
- Tool Matching
Automated Wafer Metrology
- CD Metrology
- Overlay Metrology
- Thin Film Metrology
- Topography Metrology
Automation Testing
CCS Envoy, SECSIMPro and HoTSim
Equipment Automation - SEMI Standards Support Services
MK Universal has extensive experience in implementing 200mm and 300mm standards. We offer the following SEMI standards support services:
| Standard | Name |
|---|---|
| SEMI E4 | SECS-I: SEMI Equipment Communications Standard 1 Message Transfer. |
| SEMI E5 | SECS-II SEMI Equipment Communications Standard 2 Message Content. |
| SEMI E30 | GEM: Generic Model for Communication and Control of SEMI Equipment. |
| SEMI E37 | HSMS-SS: High Speed Message Service-Single Session. |
| SEMI E39 | Object Services Standard: Concepts, Behavior, and Services. |
| SEMI E40 | Standard for Processing Management. |
| SEMI E58 | ARAMS (Automated, Reliability, Availability, and Maintainability Standard). |
| SEMI E84 | Specification for Enhanced Carrier Handoff Parallel I/O Interface. |
| SEMI E87 | Specification for Carrier Management. |
| SEMI E90 | Specification for Substrate Tracking. |
| SEMI E95 | Specification for Human Interface for Semiconductor Manufacturing Equipment. |
| SEMI E94 | Specification for Control Job Management. |
| SEMI E99 | Carrier ID Reader/Writer Functional Standard. |
| SEMI E116 | Equipment Performance Tracking. |
| SEMI E127 | Specification for Integrated measurement module communication. |
| Interface A | SEMI Standards E120, E125, E132, and E134. |
Automation Software
- Cimetrix CIMConnect and CIM300
- Asyst GWGEM
E-84 Compliance Testing
- CCS Envoy
- CCS Envoy
MES Integration
We have experience in integrating various tools to the Manufacturing Execution System (MES). Development and integration support is available for below features. Production management system
- Product tracking
- Product traceability
- Job tracking
- WIP tracking
- Recipe management
- Defect tracking
- Production routing
- Product tracking & traceability
- MES & SPC statistical process control functions
- Defect tracking
- Production routing
- Product tracking & traceability
- MES & SPC statistical process control functions